Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation

Takamasa Suzuki; Takayuki Yazawa; Osami Sasaki

doi:10.1117/12.427082

8 May 2001 Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation

Takamasa Suzuki, Takayuki Yazawa, Osami Sasaki

Author Affiliations +

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427082
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected.

Citation Download Citation

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki "Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427082

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