Use of cross-polarization measurements in the detection of grating asymmetries

Ricardo A. Depine

doi:10.1117/12.437154

14 August 2001 Use of cross-polarization measurements in the detection of grating asymmetries

Ricardo A. Depine

Proceedings Volume 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications; (2001) https://doi.org/10.1117/12.437154
Event: IV Iberoamerican Meeting of Optics and the VII Latin American Meeting of Optics, Lasers and Their Applications, 2001, Tandil, Argentina

Abstract

The difference in the curves of the zeroth order cross- polarization reflection coefficients vs. angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The result show that the differences between p yields s and s yields p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique.

Citation Download Citation

Ricardo A. Depine "Use of cross-polarization measurements in the detection of grating asymmetries", Proc. SPIE 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, (14 August 2001); https://doi.org/10.1117/12.437154

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