Ablation deposition using phase-shifted ultrashort laser pulse

Masanori Miyazawa; Atsushi Masagaki; Yasutaka Hanada; Koichi Toyoda

doi:10.1117/12.456890

25 February 2002 Ablation deposition using phase-shifted ultrashort laser pulse

Masanori Miyazawa, Atsushi Masagaki, Yasutaka Hanada, Koichi Toyoda

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456890
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

The specific deposition and atomic redistribution with use of the phase-shifted laser were examined. Phase-shifting is a unique technique to realize the abrupt intensity change in a very narrow region of focused laser beam. This technique is applied to an ultra-short laser pulse to study the interaction between particles removed from very closely separated ablation spots in focal area. Using the phase- shifted focused laser beam, atomically nonuniform deposition was observed in a femtosecond laser ablation of Cu:Zn alloy target. Atomic concentration ratio of Cu and Zn was obtained by the measurement of energy dispersive X-ray analyzer.

Citation Download Citation

Masanori Miyazawa, Atsushi Masagaki, Yasutaka Hanada, and Koichi Toyoda "Ablation deposition using phase-shifted ultrashort laser pulse", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456890

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