Fabrication of micropumps with Q-switched Nd:YAG-lasers

Tuan-Anh Mai; Nam-Trung Nguyen

doi:10.1117/12.456871

25 February 2002 Fabrication of micropumps with Q-switched Nd:YAG-lasers

Tuan-Anh Mai, Nam-Trung Nguyen

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456871
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Microfluidics has become one of the most intense research fields in MEMS technology. In this paper, the use of a 1064nm Q-switched solid state laser to fabricate micro-pump cavities in copper is presented. The focusing technique is employed fore directly structuring the micro-pumps and mixers. In this case, a laser beam with a focal spot of 50 micrometers is canned over the surface and the substrate material is ablated track by track and layer by layer. Machining results such as surface finishing and dimensional resolution are discussed. The dependence of the ablation depth, ablation rate and surface roughness on the process parameters and on the scan overlap are investigated. The laser micromachined structures are free of cracks and without any deposition of debris on the surface. The assembly and first characterization results of the pumps are reviewed. The capability as well as the potential of laser micromachining are also discussed.

Citation Download Citation

Tuan-Anh Mai and Nam-Trung Nguyen "Fabrication of micropumps with Q-switched Nd:YAG-lasers", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456871

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