Generation of periodic microstructures with femtosecond laser pulses

Hans Kurt Toenshoff; Andreas Ostendorf; Frank Korte; J. Serbin; Thorsten Bauer

doi:10.1117/12.456818

25 February 2002 Generation of periodic microstructures with femtosecond laser pulses

Hans Kurt Toenshoff, Andreas Ostendorf, Frank Korte, J. Serbin, Thorsten Bauer

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456818
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Femtosecond lasers have been proven as excellent tools for micromachining of solid targets. In contrast to other existing technologies, this method of laser processing allows structuring with highest precision by minimal damage to the adjacent material. The possibility of structuring nearly any kind of material gives access to new and innovative approaches in the field of optics. Periodic structures with dimensions on a micrometer scale are used for many photonic applications. Conventional ways of producing micrometers -scaled periodic patterns show the drawback of being limited by specific material properties, e.g. hardness, brittleness, which reduce the variety of machinable materials. However, femtosecond laser pulses offer great possibilities for the generation of periodic microstructures independent of the machined material. This includes the ablation of metals, dielectrics as well as the laser induced polymerization of photosensitive resins. Within this paper results on the generation of periodic microstructures by using femtosecond lasers are presented. Results of machining surfaces for applications like anodes and acceleration grids for streak camera tubes are presented, demonstrating a high potential for fs-laser micromachining in the field of optics.

Citation Download Citation

Hans Kurt Toenshoff, Andreas Ostendorf, Frank Korte, J. Serbin, and Thorsten Bauer "Generation of periodic microstructures with femtosecond laser pulses", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456818

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