History and future prospects of excimer lasers

Dirk Basting; Klaus D. Pippert; Uwe Stamm

doi:10.1117/12.456812

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25 February 2002 History and future prospects of excimer lasers

Dirk Basting, Klaus D. Pippert, Uwe Stamm

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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456812
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We give a review about the historical development and various technological achievements in the field of excimer lasers since their discovery in 1975. The first commercial excimer laser model in the world, the EMG 500 from Lambda Physik was operating at maximum repetition rates of only 20 Hz, whereas today multi kHz excimer lasers as the NovaLine lasers are available. In 2000, Lambda Physik introduced the most powerful commercial excimer laser, the Lambda Steel with 300w output power having extremely high stability. Over the years, various technological achievements like the NovaTube and DuraTube laser chamber technology, the NovaPowerSwitch pulsed power modules and the HaloSafe fluorine and chlorine generators could be made which make the use of excimer lasers simple and user friendly. Recently, the development of Lambda Physik's DuraTube technology gave a strong push towards the development of high power 157 nm laser technology for microlithography and laser based micromachining of difficult materials as fused silica or teflon. Current and future technological developments are discussed which will strengthen the position of excimer lasers as user friendly work horses in all industrial areas.

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Dirk Basting, Klaus D. Pippert, and Uwe Stamm "History and future prospects of excimer lasers", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456812

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