Laser-induced surface cleaning from diamond particles

Vitali I. Konov; V. V. Kononenko; A. M. Lomonosov; V. G. Mihalevich; Sergej M. Pimenov; K. V. Zhuk

doi:10.1117/12.456829

25 February 2002 Laser-induced surface cleaning from diamond particles

Vitali I. Konov, V. V. Kononenko, A. M. Lomonosov, V. G. Mihalevich, Sergej M. Pimenov, K. V. Zhuk

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456829
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Kr-laser removal of micro and nano sized diamond particles deposited on Si substrates from alcohol solution in an ultrasonic bath has been investigated. The process control was performed ex situ by optical microscopy and in situ by measurements of the acoustic signals in the substrate and in the surrounding air. Optimal cleaning conditions as well as substrate surface damage threshold were found. The mechanism of diamond particles laser removal process was studied.

Citation Download Citation

Vitali I. Konov, V. V. Kononenko, A. M. Lomonosov, V. G. Mihalevich, Sergej M. Pimenov, and K. V. Zhuk "Laser-induced surface cleaning from diamond particles", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456829

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