Paper
25 February 2002 Laser microfabrication by ultrashort UV pulses
I. Zergioti, D. G. Papazoglou, Nikos A. Vainos, Costas Fotakis
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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456833
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
Recent advances of direct printing or elemental and compound microstructures by Laser Induced Forward Technique (LIFT) using a femtosecond UV laser will be presented. LIFT Is a technique enabling the direct controlled transfer of thin film materials between substrates. For example an ultrashort UV laser has been used to transfer molecular material (E.g. InOx) onto glass substrates in order to form optical diffractive structures. The LIFT process enables reproduction of the metal and oxide's structural and physical properties. Subsequent ultraviolet illumination by a 325nm HeCd laser has induced dynamic refractive index changes of the InOx grating. This optical behavior is similar to the holographic recording behavior of the InOx thin films. Similar experiments with metals and other molecular materials will be presented and discussed. The use of laser-based methods, in the fabrication of optically activated microstructures, opens new applications possibilities in the area of optoelectronics.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Zergioti, D. G. Papazoglou, Nikos A. Vainos, and Costas Fotakis "Laser microfabrication by ultrashort UV pulses", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456833
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KEYWORDS
Indium oxide

Ultraviolet radiation

Glasses

Diffraction gratings

Excimer lasers

Thin films

Holography

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