Precision machining of innovative materials using 157-nm excimer laser radiation

Andreas Ostendorf; Uwe Stamm; Thorsten Temme

doi:10.1117/12.456905

25 February 2002 Precision machining of innovative materials using 157-nm excimer laser radiation

Andreas Ostendorf, Uwe Stamm, Thorsten Temme

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456905
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

The F₂ excimer laser emitting at 157 nm have been developed to reliable industrial machines applicable for micro-fabrication. Fluorine lasers are available at various power ratings, with energies between 1 mJ and more than 50 mJ and repetition rates up to 2 kHz. The applications of the F₂ lasers presented here are mainly related to the micro-machining of glasses, with a special focus on fused silica. Depending on the applied fluence, fused silica can be processed with 157 nm by material ablation as well as by modifying the optical properties, when the energy density is beyond the ablation threshold. Both techniques qualify the 157 nm for manufacturing optical elements like planar wave guides or grating structures. Furthermore, the wavelength has been tested for micro-fluidic and micro-mechanical structures.

Citation Download Citation

Andreas Ostendorf, Uwe Stamm, and Thorsten Temme "Precision machining of innovative materials using 157-nm excimer laser radiation", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456905

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available