Progressive growth of tungsten microcones using nanosecond pulsed-Nd:YAG laser irradiation in various atmospheres

Yuji Kawakami; Eiichi Ozawa

doi:10.1117/12.456847

25 February 2002 Progressive growth of tungsten microcones using nanosecond pulsed-Nd:YAG laser irradiation in various atmospheres

Yuji Kawakami, Eiichi Ozawa

Author Affiliations +

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456847
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We have discovered coherent arrays of ultrafine particles around a laser-irradiated mark. We tried to apply these arrays for electron emission guns. However, it was not successful due to their low aspect ratio. We observed microcones, which were made in the laser-irradiated mark on the initial surface of the target material. They seem to have a higher aspect ratio than the coherent arrays because heavy irradiation was needed to obtain cones with a high aspect ratio. Therefore, we examined the tungsten microcone growth in various gas atmospheres. The experimental results indicated that tungsten microcone growth did not depend on the impurities in the gases. In this paper we experimentally show the morphologies of the microcone in order to understand the microcone formation mechanism in various ambient atmospheres such as helium, SF₆, and air. The difference in the microcone formation mechanism among the tungsten and Si substrate is discussed as related to the VLS (vapor-liquid-solid) mechanism.

Citation Download Citation

Yuji Kawakami and Eiichi Ozawa "Progressive growth of tungsten microcones using nanosecond pulsed-Nd:YAG laser irradiation in various atmospheres", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456847

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