Paper
25 February 2002 Recent progress of laser precision microfabrication in China
Zhaogu Cheng, Guoliang Xu, Quanzhong Zhao, Cuiqing Liu
Author Affiliations +
Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456881
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
Review on recent progress of laser precision microfabrication in China is given in this paper. The universal fields of the LPM mostly using short pulse and short wavelength lasers in China are as follows: new materials, advanced manufacturing technology, information technology, biological technology, medical treatment and so on, which are given priority to the development in high-tech fields in China.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhaogu Cheng, Guoliang Xu, Quanzhong Zhao, and Cuiqing Liu "Recent progress of laser precision microfabrication in China", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456881
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KEYWORDS
Excimer lasers

Information technology

Laser applications

Microfabrication

Manufacturing

Nd:YAG lasers

Optical storage

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