Integrated micro 4f-optical imaging system for the characteriztion of mesoscopic DOEs

Xiao Gao; Jonathan Bates; David Pustai; Dennis W. Prather

doi:10.1117/12.448155

13 November 2001 Integrated micro 4f-optical imaging system for the characteriztion of mesoscopic DOEs

Xiao Gao, Jonathan Bates, David Pustai, Dennis W. Prather

Proceedings Volume 4437, Gradient Index, Miniature, and Diffractive Optical Systems II; (2001) https://doi.org/10.1117/12.448155
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

In this paper we present the design and characterization of a micro 4f optical imaging system for the purpose of characterizing mesoscopic diffractive optical elements. To this end, we demonstrate the systems' ability to measure very small variation sin diffraction intensity with high resolution. Because the system is illuminated by both coherent and incoherent sources, we characterize the cutoff frequency and modulation transfer function to determine the spatial resolution of the system. The system is validated by comparing measured results to theoretical predictions.

Citation Download Citation

Xiao Gao, Jonathan Bates, David Pustai, and Dennis W. Prather "Integrated micro 4f-optical imaging system for the characteriztion of mesoscopic DOEs", Proc. SPIE 4437, Gradient Index, Miniature, and Diffractive Optical Systems II, (13 November 2001); https://doi.org/10.1117/12.448155

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