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9 November 2001 Microretarder array for imaging polarimetry in the visible wavelength region
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Abstract
We made a form birefringent micro-retarder array for the real-time imaging polarimetry. The polarimetry system is composed of an imaging lens, the retarder array, a polarization film, and an image sensor. We fabricated a 92x70 retarder array by the electron-beam lithography and the reactive ion etching. Each retarder was a TiO2 subwavelength grating of 0.15(mu) nm in a period on a silica substrate. Some polarization images of four Stokes parameters were obtained with the polarimetry system.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tetsuya Hamamoto, Hiroshi Toyota, and Hisao Kikuta "Microretarder array for imaging polarimetry in the visible wavelength region", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448051
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