PROCEEDINGS VOLUME 4449
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY | 29 JULY - 3 AUGUST 2001
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Editor Affiliations +
IN THIS VOLUME

8 Sessions, 31 Papers, 0 Presentations, 0 Posters
Ellipsometry  (4)
Nano Probes  (3)
Proceedings Volume 4449 is from: Logo
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY
29 July - 3 August 2001
San Diego, CA, United States
157 nm/193 nm Techniques
Axel Engel, Ewald Moersen, A. Jordanov, Konrad Knapp
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450080
Chidane Ouchi, Masanobu Hasegawa, Akira Matsumoto, Kazuho Sone
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450089
Christian Muehlig, Siegfried Kufert, Sylvia Bark-Zollmann, Wolfgang Triebel
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450100
Tadahiko Saito, Jun Saito, Etsuro Nakamura, Tatsunobu Kudo, Masanao Kagaya, Tetsuo Takahashi
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450106
Pierre Boher, Patrick Evrard, Jean-Philippe Piel, Jean-Louis P. Stehle
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450107
Ellipsometry
Blaine D. Johs, Jeff Hale, Natale Joseph Ianno, Craig M. Herzinger, Thomas E. Tiwald, John A. Woollam
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450108
Mathias Schubert, Alexander Kasic, Stephan Figge, Marc Diesselberg, Sven Einfeldt, Detlef Hommel, Ulrich Koehler, Donat Josef As, Juergen Off, et al.
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450109
Pierre Boher, Marc Bucchia, Jean-Philippe Piel, Christophe Defranoux, Jean-Louis P. Stehle, Christopher Pickering
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450110
Pierre Boher, Jean-Philippe Piel, Jean-Louis P. Stehle, Christopher Pickering, Alexandre Tarnowka
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450081
Material and Thin Film Characterization
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450082
Doerte Schoenfeld, Bodo Kuehn, Armin Steinert, Ralf Takke
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450083
Ruediger Grunwald, Stefan Nerreter, Jens Wolfgang Tomm, Sandy Schwirzke-Schaaf, Fabian Doerfel
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450084
Marco Giuseppe Beghi, Carlo E. Bottani, Andrea Li Bassi, Brian K. Tanner, Andrea C. Ferrari, K. B. K. Teo, J. Robertson
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450085
Particle Scattering
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450086
Vladimir I. Ivakhnenko, John C. Stover, Craig A. Scheer, Yuri A. Eremin
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450087
John C. Stover, Craig A. Scheer
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450088
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450090
Large Area and Aspheric Surface Inspection
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450091
David Vaughnn, Cory Watkins, Dick Anderson
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450092
Joseph Cohen-Sabban, Jerome Gaillard-Groleas, Pierre-Jean Crepin
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450093
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450094
Ingolf Weingaertner, Michael Schulz, Peter Thomsen-Schmidt, Clemens Elster
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450095
Warwick W. Clegg, David F. L. Jenkins, Na Helian, James Windmill, Robert Windmill
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450096
Nano Probes
Hendrik Rothe, Guenther Wilkening, Dorothee Hueser
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450097
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450098
Robert Brunner, Joerg Bischoff, Klaus Rudolf, Margit Ferstl
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450099
X-Ray Techniques
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450101
Victor E. Asadchikov, Inna N. Bukreeva, Angela Duparre, Igor V. Kozhevnikov, Yury S. Krivonosov, Christian Morawe, Mikhail V. Pyatakhin, Joerg Steinert, Alexander V. Vinogradov, et al.
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450102
Posters - Thursday
Thomas Haensel, Andreas Nickel, Axel Schindler
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450103
Jerzy Ciosek, Wojciech Paszkowicz, Piotr Pankowski, Jerzy B. Pelka, Lech T. Baczewski, Jan Marczak, Roman Ostrowski
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450104
Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, Thomas A. Germer
Proceedings Volume Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (2001) https://doi.org/10.1117/12.450105
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