Paper
10 December 2001 Standardization of the measurement of laser-induced damage threshold and material absorption
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Abstract
Attempts have been made over a number of years to scale laser induced damage threshold measurements across the boundaries of pulse length, spot size, wavelength and material differences. These efforts have been hampered by the absence of pertinent data, made under identical conditions, on the threshold results that have been published. The new ISO 11254-1, -2, -3 Standards for the Measurement of Laser Induced Damage and ISO11551 for Absorption have now been finalised and if accepted by the scientific fraternity will enable meaningful comparative results to be published. This paper will discuss the similarities and differences between 1- on- 1, S- on- 1 and R- on- 1, laser induced damage threshold, LIDT, measurements and damage assurance methodology and will show how differences in absorption can effect both the damage values and the damage morphology.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roger M. Wood "Standardization of the measurement of laser-induced damage threshold and material absorption", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450082
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Absorption

Laser damage threshold

Standards development

Laser induced damage

Pulsed laser operation

Dielectric breakdown

Temperature metrology

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