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27 December 2001 Applicability of iTIRM for roughness reduction monitoring
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Abstract
The results obtained with iTIRM during polishing are presented. It is shown that iTIRM unites the working ranges of several other techniques where iTIRM can be used during production where the others cannot. The applicable range of iTIRM is shown to be at least 1 micrometers down to 0.1 nm rms.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert-Jaap van der Bijl, Hedser H. van Brug, Oliver W. Faehnle, and Joseph J. M. Braat "Applicability of iTIRM for roughness reduction monitoring", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453632
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