Fabrication of integrated diffractive micro-optics for MEMS applications

Larry R. Senesac; R. H. Farahi; James L. Corbeil; Dennis Duncan Earl; Slobodan Rajic; Panos G. Datskos

doi:10.1117/12.453628

27 December 2001 Fabrication of integrated diffractive micro-optics for MEMS applications

Larry R. Senesac, R. H. Farahi, James L. Corbeil, Dennis Duncan Earl, Slobodan Rajic, Panos G. Datskos

Proceedings Volume 4451, Optical Manufacturing and Testing IV; (2001) https://doi.org/10.1117/12.453628
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We investigated the fabrication of integrated diffractive micro-optical features on MEMS structures for the purpose of motion detection. The process of producing the diffractive features and the MEMS structures by focused ion beam milling is described in detail, as is the ion beam sputtering process used to produce coatings on these structures. The diffractive features of the circular Fresnel zone plate (FZP) and spiral FZP were fabricated on MEMS structures and the relevant diffraction theory is discussed. The spiral FZP diffractive features produced well defined foci whose intensity varies with distance from the FZP. Observation of these intensity variations enable us to detect the motion of the MEMS structure, and the resulting device was used to scan an IR image of a hot object.

Citation Download Citation

Larry R. Senesac, R. H. Farahi, James L. Corbeil, Dennis Duncan Earl, Slobodan Rajic, and Panos G. Datskos "Fabrication of integrated diffractive micro-optics for MEMS applications", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453628

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