High-precision 2D angle measurement using fringe analysis techniques

Zongtao Ge; Takayuki Saito; Shinichi Matsuda; Mitsuo Takeda

doi:10.1117/12.453643

27 December 2001 High-precision 2D angle measurement using fringe analysis techniques

Zongtao Ge, Takayuki Saito, Shinichi Matsuda, Mitsuo Takeda

Proceedings Volume 4451, Optical Manufacturing and Testing IV; (2001) https://doi.org/10.1117/12.453643
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

In this paper, a novel angle measurement method using the fringe analysis techniques is proposed. In this method, a 2D surface profile including a tilt is obtained by fringe analysis, and the tilt in the 2D surface profile is determined by fitting the obtained surface profile with a plane. From the fitted plane, 2D angles can be easily obtained. Simulations using the Fourier transform and phase- shift methods are performed, and the results are compared with each other. Simulations show that 2D angle measurement using the fringe analysis techniques can achieve simultaneously a wide measurement range and high precision.

Citation Download Citation

Zongtao Ge, Takayuki Saito, Shinichi Matsuda, and Mitsuo Takeda "High-precision 2D angle measurement using fringe analysis techniques", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453643

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