Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Masaaki Ichiki; Lulu Zhang; Zhanjie Wang; Yasushi Morikawa; Makoto Tanaka; Ryutaro Maeda

doi:10.1117/12.432952

9 July 2001 Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, Ryutaro Maeda

Proceedings Volume 4467, Complex Mediums II: Beyond Linear Isotropic Dielectrics; (2001) https://doi.org/10.1117/12.432952
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600 degree(s)C and 900 degree(s)C was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO₂/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.

Citation Download Citation

Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, and Ryutaro Maeda "Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition", Proc. SPIE 4467, Complex Mediums II: Beyond Linear Isotropic Dielectrics, (9 July 2001); https://doi.org/10.1117/12.432952

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