Design, performance, and reliability of a high-angular-resolution wide-angular-range large-aperture fully-automated UV scatterometer

Ivan G. Kuznetsov; David A. Content; Rene A. Boucarut; Timothy J. Madison

doi:10.1117/12.454277

30 January 2002 Design, performance, and reliability of a high-angular-resolution wide-angular-range large-aperture fully-automated UV scatterometer

Ivan G. Kuznetsov, David A. Content, Rene A. Boucarut, Timothy J. Madison

Author Affiliations +

Proceedings Volume 4485, Optical Spectroscopic Techniques, Remote Sensing, and Instrumentation for Atmospheric and Space Research IV; (2002) https://doi.org/10.1117/12.454277
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Design and performance of Fully Automated Ultraviolet Spectrographic Tester (FAUST) providing Bidirectional Scatter Distribution Function (BSDF) measurements at wavelengths ranging from the vacuum ultraviolet to the infrared has been described in details. The instrument is capable of measuring both very near (3 arcseconds) and very wide angle (over 120 degrees) scatter off both highly specular (mirrors and gratings) and highly diffuse surfaces for +/- 90 degrees incidence angle variations. Scatterometer dynamic range of over 11 orders of magnitude has been demonstrated. Stray light reduction techniques practicing for instrument signature improvement are discussed. Principles of light sources and detectors choice, instrument automation and calibration are explained. Instrument signature data along with some examples of a list of scatter measurements and gratings efficiency measurements performed by the use of FAUST are also presented here.

Citation Download Citation

Ivan G. Kuznetsov, David A. Content, Rene A. Boucarut, and Timothy J. Madison "Design, performance, and reliability of a high-angular-resolution wide-angular-range large-aperture fully-automated UV scatterometer", Proc. SPIE 4485, Optical Spectroscopic Techniques, Remote Sensing, and Instrumentation for Atmospheric and Space Research IV, (30 January 2002); https://doi.org/10.1117/12.454277

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