Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy

Michael Feser; Chris J. Jacobsen; Pavel Rehak; Gianluigi DiGeronimo; Peter Holl; Lothar Strueder

doi:10.1117/12.450229

13 December 2001 Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy

Michael Feser, Chris J. Jacobsen, Pavel Rehak, Gianluigi DiGeronimo, Peter Holl, Lothar Strueder

Author Affiliations +

Proceedings Volume 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II; (2001) https://doi.org/10.1117/12.450229
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

An integrating solid state detector with segmentation has been developed that addresses the needs in scanning transmission x-ray microscopy below 1 keV photon energy. The detector is not cooled and can be operated without an entrance window which leads to a total photon detection efficiency close to 100%. The chosen segmentation with 8 independent segments is matched to the geometry of the STXM to maximize image mode flexibility. In the bright field configuration for 1 ms integration time and 520 eV x-rays the rms noise is 8 photons per integration.

Citation Download Citation

Michael Feser, Chris J. Jacobsen, Pavel Rehak, Gianluigi DiGeronimo, Peter Holl, and Lothar Strueder "Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); https://doi.org/10.1117/12.450229

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