Surface quality of x-ray mirrors evaluated at the advanced photon source

Lahsen Assoufid; Ali M. Khounsary; Jun Qian; Albert T. Macrander; Dennis M. Mills

doi:10.1117/12.448498

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14 November 2001 Surface quality of x-ray mirrors evaluated at the advanced photon source

Lahsen Assoufid, Ali M. Khounsary, Jun Qian, Albert T. Macrander, Dennis M. Mills

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Proceedings Volume 4501, X-Ray Mirrors, Crystals, and Multilayers; (2001) https://doi.org/10.1117/12.448498
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

X-ray mirrors are polished and often coated optical substrates used on many synchrotron x-ray beamlines to reflect, focus, steer, or filter x-ray beams. Because their performance depends strongly on their surface quality, they are usually evaluated after delivery, independently (from the vendor), for compliance before acceptance by the buyer. This paper summarizes results of surface roughness and slope error measurements of mirrors delivered to the Advance Photon Source (APS) and evaluated in the metrology laboratory during the period 1996 - 2001, using non-contact surface profilometry. For all the mirrors evaluated, the measured root-mean square (rms) slope error values range from 0.5 to 4.7 (mu) rad rms, and the surface rms values range from 0.9 to 4.3 A rms. Most of the measured mirrors have met the user specifications.

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Lahsen Assoufid, Ali M. Khounsary, Jun Qian, Albert T. Macrander, and Dennis M. Mills "Surface quality of x-ray mirrors evaluated at the advanced photon source", Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); https://doi.org/10.1117/12.448498

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