Thin film multilayer fan-beam x-ray monochromator

Richard J. Harms; Peter J. Serlemitsos; Scott M. Owens

doi:10.1117/12.448495

14 November 2001 Thin film multilayer fan-beam x-ray monochromator

Richard J. Harms, Peter J. Serlemitsos, Scott M. Owens

Proceedings Volume 4501, X-Ray Mirrors, Crystals, and Multilayers; (2001) https://doi.org/10.1117/12.448495
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Spatially extended quasi-monoenergetic x-ray beams will allow improved performance for many applications in diagnostic radiology. X-rays with well-defined energies between 15 keV and 20 keV can be used to enhance the contrast of mammography images while reducing dose to the patient. Diagnostic radiology using iodine, xenon, or barium as a contrast agent can be made more sensitive by using nearly monoenergetic x-rays with energies just above and below their K edges near 33 keV, 34 keV, and 37 keV. We describe the design and preliminary performance measurements of a prototype thin film multilayer x-ray narrow-band filter or monochromator designed to produce fan-shaped beams of x-rays at 33 keV. A set of closely spaced thin foil substrates coated with graded Pt/C multilayers provides energy selectivity when illuminated by a diverging broad-band x-ray beam incident on the foils at near-grazing angles from 0.2 degrees to 0.3 degrees. The individual thin foil mirrors are mounted into top and bottom precision alignment structures formed by deep reactive ion etching 1-mm thick silicon wafers.

Citation Download Citation

Richard J. Harms, Peter J. Serlemitsos, and Scott M. Owens "Thin film multilayer fan-beam x-ray monochromator", Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); https://doi.org/10.1117/12.448495

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