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8 August 2001Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions
Under etching of convex corners during the fabrication process of pressure sensor with the 'bossed' type structure seriously deteriorates parameters of these devices. The problem can be solved by application of properly designed masks with compensating corners.
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Irena Barycka, Jan Dziuban, Malgorzata Kramkowska, Irena Zubel, "Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions," Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435942