Paper
8 August 2001 Noncontact sensor structure interface
Author Affiliations +
Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435916
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland
Abstract
A non-contact passive inductive interface to any type of capacitive sensor structure is presented in the paper. The interface performance is based on the magnetic coupling between two planar coils where one is located on the sensor die and the other is the pat of measurement circuit. The interface construction ins very simple in fabrication and reliable in operation. The theoretical calculations, metrological parameters analysis as well as a sensitivity on the interface parameters variation are discussed in the report.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jacek Sochon, Jerzy Weremczuk, and Ryszard Jachowicz "Noncontact sensor structure interface", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435916
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KEYWORDS
Sensors

Interfaces

Inductance

Silicon

Capacitance

Transmitters

Dielectrics

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