Anodic alumina as a basis for various-purpose micro-electro-mechanical devices

Georgy I. Efremov; Nikolay Ivanovich Mukhurov

doi:10.1117/12.442981

28 September 2001 Anodic alumina as a basis for various-purpose micro-electro-mechanical devices

Georgy I. Efremov, Nikolay Ivanovich Mukhurov

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442981
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Applications prospects for micro-electro-mechanical devices and examples of their design as electrostatic micro-relays, dilatometric sensors, and arrow indicator heads are presented in the paper. Fabrication of these devices is based on unique possibilities of alumina technology to form various design elements in a single monolithic part, as well as on high physical and mechanical parameters of anodic alumina.

Citation Download Citation

Georgy I. Efremov and Nikolay Ivanovich Mukhurov "Anodic alumina as a basis for various-purpose micro-electro-mechanical devices", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442981

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