Fabrication of axisymmetric ceramic microparts using pulsed laser ablation

Karl L. Boehlen; Phil T. Rumsby; Alfred Cerezo; Min Huang

doi:10.1117/12.442935

28 September 2001 Fabrication of axisymmetric ceramic microparts using pulsed laser ablation

Karl L. Boehlen, Phil T. Rumsby, Alfred Cerezo, Min Huang

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442935
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Novel methods using pulsed laser ablation have been developed for the manufacture of micro-devices with axial symmetry in ceramic materials. Such techniques allow the prototyping and production of micro-parts that are very difficult or even impossible to process by other mechanical and/or chemical methods. To demonstrate these techniques we have manufactured small conical counter-electrodes for use in a Scanning Atom Probe (SAP) instrument. This paper details all the innovative steps developed to produce the double cone shaped electrode and demonstrates the potential for mass production of other devices of similar shapes and dimensions. Many different laser processing strategies for fabricating the cones have been tried in order to achieve a result with satisfactory accuracy and quality. High quality devices have finally been produced in quantity using a combination of excimer laser mask projection and UV Yag laser cutting. The laser methods developed allow micro-parts of an overall size down to 0.1mm and tolerances of a few microns to be manufactured directly in ceramics, glasses, or crystalline materials.

Citation Download Citation

Karl L. Boehlen, Phil T. Rumsby, Alfred Cerezo, and Min Huang "Fabrication of axisymmetric ceramic microparts using pulsed laser ablation", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442935

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