Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching

June-Young Lee; Seong-Hyok Kim; Hyung-Taek Lim; Che-Heung Kim; Yong-Kweon Kim

doi:10.1117/12.442952

28 September 2001 Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching

June-Young Lee, Seong-Hyok Kim, Hyung-Taek Lim, Che-Heung Kim, Yong-Kweon Kim

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442952
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The comb actuator deformed by microloading effect in DRIE process generally has í«Lí» shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to explain the driving characteristics. For modeling convenience, the damaged comb electrode is assumed to be a simple í«Lí» shape. According to the modeling, the resonant frequency is estimated to increase as the bias voltage increases. The static displacement curve shows í«Sí» shape.

Citation Download Citation

June-Young Lee, Seong-Hyok Kim, Hyung-Taek Lim, Che-Heung Kim, and Yong-Kweon Kim "Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442952

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