GaAs-membrane-supported millimeter-wave filters

George Konstantinidis; Alexandru Mueller; George Deligiorgis; Ioana Petrini; Dan Vasilache; Dan Neculoiu; Michalis Lagadas; Cristina Buiculescu; Viorel Avramescu; Sergiu A. Iordanescu; Pierre Blondy

doi:10.1117/12.443031

1 October 2001 GaAs-membrane-supported millimeter-wave filters

George Konstantinidis, Alexandru Mueller, George Deligiorgis, Ioana Petrini, Dan Vasilache, Dan Neculoiu, Michalis Lagadas, Cristina Buiculescu, Viorel Avramescu, Sergiu A. Iordanescu, Pierre Blondy

Author Affiliations +

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443031
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrate. For the first time, a 2.2 micrometers thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semiinsulating <100> GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequency of 38 respectively 77 GHz were designed and manufactured on GaAs micromachined substrate. `On wafer' measurements for the filter structures were performed. Losses less than 1.5 dB at 38 GHz and less than 2 dB at 77 GHz have been obtained for both the silicon as well as for the GaAs based micromachined filters.

Citation Download Citation

George Konstantinidis, Alexandru Mueller, George Deligiorgis, Ioana Petrini, Dan Vasilache, Dan Neculoiu, Michalis Lagadas, Cristina Buiculescu, Viorel Avramescu, Sergiu A. Iordanescu, and Pierre Blondy "GaAs-membrane-supported millimeter-wave filters", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443031

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