Optimization, simulation, and fabrication of a microgyroscope

Shifeng Li; Shaochen Chen

doi:10.1117/12.443038

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1 October 2001 Optimization, simulation, and fabrication of a microgyroscope

Shifeng Li, Shaochen Chen

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Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443038
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

This paper presents an optimized method for microgyroscope design. A lumped dynamic model is presented to optimize the microgyroscope performances. The parameters are categorized into function variables and style variables to reduce optimization cost. The maximum sensitivity and minimum area of the device are selected and weighted as the combined multiple objective functions. The optimization is conducted with a solver in Excel 9.5^TM Finite element simulation is used to verify these optimized results. Simulation results show good agreement with the calculation. The optimized microgyroscope was fabricated. The resonant characteristic from experiment is compared with the optimized results and simulation results.

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Shifeng Li and Shaochen Chen "Optimization, simulation, and fabrication of a microgyroscope", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443038

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