Simple wireless powering scheme for MEMS devices

Jie Wu; Victor Quinn; Gary H. Bernstein

doi:10.1117/12.443039

1 October 2001 Simple wireless powering scheme for MEMS devices

Jie Wu, Victor Quinn, Gary H. Bernstein

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443039
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

With recent developments in micromachining technology, fabrication of discrete microdevices is maturing; consequently, system integration is becoming an ever more important issue. One obstacle to such systems is the diverse power requirements of microdevices, especially actuators. Since some types of actuators exhibit relatively high voltage or power requirements, it is not feasible to integrate power supplies on-chip, and it is often inconvenient for the MEMS system to be tethered to interconnects for purposes of supplying power. On-chip wireless power sources can be implemented to circumvent this problem.

Citation Download Citation

Jie Wu, Victor Quinn, and Gary H. Bernstein "Simple wireless powering scheme for MEMS devices", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443039

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