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2 October 2001 Development of optical MEMS carbon dioxide sensors
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Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443100
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
A NDIR-based sensor-chip using MEMS Si micro-bridge elements, with integrated PBG structure for wavelength tuning is discussed. The effects of processing on device performance, especially device release, were investigated. Thermal and electrical device characterization was used to quantify loss mechanisms. Thermally isolated, uniformly heated emitters were ultimately achieved using a backside release etch fabrication process. The fully released devices demonstrated superior electric to thermal (optical) conversion, with the requisite narrow band emission for CO2 detection. Using the MEMS sensor-chips, 20% CO2 detection was demonstrated, with projected sensitivities of ~3% CO2.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nicholas Moelders, Mark P. McNeal, Martin U. Pralle, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, Thomas George, and Daniel S. Choi "Development of optical MEMS carbon dioxide sensors", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443100
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