Improvement on the surface roughness of microlens array in the excimer laser machining process

Shuh-Yi Wang; Chi-Sheng Huang; Hsau-Yu Chou; Tone-Yen Lee; Rang-Seng Chang

doi:10.1117/12.443082

2 October 2001 Improvement on the surface roughness of microlens array in the excimer laser machining process

Shuh-Yi Wang, Chi-Sheng Huang, Hsau-Yu Chou, Tone-Yen Lee, Rang-Seng Chang

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443082
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A new process that improves the surface roughness of microlens array after the excimer laser machining is studied. The results show that the smoother surface has been fabricated by this innovatory method. The excimer laser with mask projection machining has been successfully applied for the fabrication of 2.5D micro parts. Furthermore, the workpiece dragging machining is capable of manufacturing microstructure array with curved surface by using various shape of mask. But during the machining process, the laser is cutting shoot by shoot and the material is gradually removed layer by layer. The laser marks on the curved surface of micro lens array is obvious and inevitable. This defect limits the product of dragging in real optical application. To overcome this drawback, an improved process is studied. When the desired shape of lens array was machined by the excimer laser machining, the attaching photo resist with the thickness of several micro meter is coated on the rough surface by spin coating or spraying. Then the lens array is baked to get the mirror surface. This original method combines the advantage of the higher fill factor and the smoother surface for the fabrication of micro lens array.

Citation Download Citation

Shuh-Yi Wang, Chi-Sheng Huang, Hsau-Yu Chou, Tone-Yen Lee, and Rang-Seng Chang "Improvement on the surface roughness of microlens array in the excimer laser machining process", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443082

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