Optical sensors with MEMS, slit masks, and micromechanical devices

Rainer Riesenberg; Andreas Wuttig

doi:10.1117/12.443101

2 October 2001 Optical sensors with MEMS, slit masks, and micromechanical devices

Rainer Riesenberg, Andreas Wuttig

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443101
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Concepts to increase the performance of optical sensors by combination with optical MEMS are discussed. Architectures of subsystems are reviewed, which modulate or switch the amplitude of the light by scanning, multiplexing and selecting interesting signal components (multi-object-mode). Arrangements with MEMS for optical sensors and instruments can decrease the pixel size and increase their number by creating virtual pixels. A number of signal components can be detected with a smaller number of detectors (detector pixels) by scanning. If the scanning is substituted by multiplexing the best efficiency is achieved. The measurement time can be reduced by selecting interesting objects or signal components to be detected. Architectures which combine single sensors, linear sensor arrays or two dimensional detector arrays with MEMS, slit masks, and micro-mechanical devices are discussed. Such devices are micro-mirrors, micro-shutters, the slit positioning system, the fibre positioning system, and other optical switches.

Citation Download Citation

Rainer Riesenberg and Andreas Wuttig "Optical sensors with MEMS, slit masks, and micromechanical devices", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443101

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