Self-assembly of surface-micromachined structures using electrostatic attraction

Robert W. Johnstone; M. Parameswaran

doi:10.1117/12.443076

2 October 2001 Self-assembly of surface-micromachined structures using electrostatic attraction

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443076
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The paper extends the work done using micro-fabricated hinges in surface micromachining to create fully 3D devices. These devices include free-space micro-optic systems and various sensors. While these applications are interesting, the assembly process is difficult. We present the basic theory and process necessary to perform the assembly using electrostatic interactions. The process is easy and reliable. We were able to lift early prototype mirrors with voltages as low as 35 volts.

Citation Download Citation

Robert W. Johnstone and M. Parameswaran "Self-assembly of surface-micromachined structures using electrostatic attraction", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443076

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