Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides

Thor Bakke; Chris P. Tigges; Charles T. Sullivan

doi:10.1117/12.443078

2 October 2001 Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides

Thor Bakke, Chris P. Tigges, Charles T. Sullivan

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443078
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A micro-mechanical optical switch based on lateral deflection of a waveguide is described. The switching element is a suspended silicon beam formed by deep reactive ion etching and release of silicon-on-insulator (SOI). Actuation is implemented using integrated electrostatic comb drives. Dry etched polymeric optical waveguides are post processed onto the mechanical structure. We present design, simulations, and preliminary experimental results.

Citation Download Citation

Thor Bakke, Chris P. Tigges, and Charles T. Sullivan "Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443078

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