Automation techniques for the handling of photomask data

J. Gordon Hughes; Leslie Drennan

doi:10.1117/12.458292

11 March 2002 Automation techniques for the handling of photomask data

J. Gordon Hughes, Leslie Drennan

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Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458292
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

This paper reviews four different strategies that can be used in the automated processing of photomask manufacturing data. The first of these is the automation of specific process steps such as the generation of Barcodes and Titling data, or specific software to perform format conversion, job deck generation or automated fracturing. The second strategy is the automation of complete flows that are specific to a customer or product type. This type of automation can be successfully built using the primitives developed by the first strategy. The third strategy is the automation of generic flow steps that are then applied to all customers. This is a much more powerful solution, but is significantly more demanding in the effort required for the design and implementation. The final strategy, the integration of automation over multiple complete supply chains is a desirable end game. The paper will report on the latest activities of the European Commission Fifth Framework project called Automatic Mask Order Processing System (AutoMOPS) that is developing a prototype implementation of a distributed server architecture that will allow automation and integration within the photomask manufacturing supply chain. The advantages and weaknesses of each of these techniques are reviewed using examples of automation which has been undertaken within Compugraphics over the previous decade. The interaction between these techniques is reviewed, as well as the evolution of solutions from each technique and the systems environment where these techniques are used.

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J. Gordon Hughes and Leslie Drennan "Automation techniques for the handling of photomask data", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458292

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KEYWORDS

Photomasks

Data processing

Manufacturing

Software development

Computed tomography

Data conversion

Computer programming

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