Hierarchical GDSII-based fracturing and job deck system

Nicolas B. Cobb; Emile Y. Sahouria

doi:10.1117/12.458356

11 March 2002 Hierarchical GDSII-based fracturing and job deck system

Nicolas B. Cobb, Emile Y. Sahouria

Author Affiliations +

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458356
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

We describe a mask data preparation (MDP) flow using GDSII data. We describe why this flow is minimally disruptive, flexible, and efficient. The mask floor-planning composition can be stored in GDSII so that all layout data is in the same format. We describe how GDSII data can be hierarchically fractured. We use a technique involving the optimal determination of 'cover cells'. Use of cover cell placements allows a large reduction in runtime and data volume. In one case, we fractured a very large design with assist bars and OPC to a 28 GB MEBES mode 5 file. After application of cover cells, the same data fractures to roughly 360 MB -- a reduction of more than 75x.

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Nicolas B. Cobb and Emile Y. Sahouria "Hierarchical GDSII-based fracturing and job deck system", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458356

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