Highly versatile tapeout automation system

Richard D. Morse

doi:10.1117/12.458293

11 March 2002 Highly versatile tapeout automation system

Richard D. Morse

Author Affiliations +

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458293
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

Developing a tapeout automation system that works in a static environment where inputs and outputs can be defined - as in a vertically integrated Semiconductor Company - is relatively straightforward. In an environment with a large variety of inputs and outputs, a more versatile system must be developed. The key elements of such a system must be flexibility and ease of maintenance. In order to accomplish this, D2W has developed a software-independent suite of tools which employs a highly modular approach and dynamic variable substitution to enable everything from multi-processing to customer-specific documentation. This system routinely manages tapeout flows with several thousand variables in a highly accurate, high speed, fully automated mode. These tools have been developed and refined over a period of 10 years and deployed for tapeouts to more than 40 companies, implementing in excess of 100 technologies, and successfully interfacing with 14 or more commercial and captive mask shops worldwide

Citation Download Citation

Richard D. Morse "Highly versatile tapeout automation system", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458293

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE