Slashing turnaround-time by introducing distributed computing

Gerd Ballhorn

doi:10.1117/12.458291

11 March 2002 Slashing turnaround-time by introducing distributed computing

Gerd Ballhorn

Author Affiliations +

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458291
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

Mask data preparation has become a major concern in the supply chain from design to the fab. The mask industry is facing a number of problems induced by a massive introduction of OPC. Affecting the design flow the exponentially escalating data volume came into focus because the data-prep infrastructure fails to keep up with this development. As a consequence the turn around time from tape out to 'ready to write' data is permanently rising from a couple of hours 2 years ago to many days/weeks nowadays. Computation times of many days on modern workstations is no exception anymore. Especially when mask data have to be converted to another writing tools data format or just a mask manufacturing process has to be adapted by modifying the data bias, we encountered computing times of more than hundred hours for a single layer. We found a way to reduce these computation times by a factor of more than 100 by introducing distributed computing on a Linux based cluster.

Citation Download Citation

Gerd Ballhorn "Slashing turnaround-time by introducing distributed computing", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458291

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE