New pneumatically actuated miniature gripper for micro assembly

Sebastian Buetefisch; Stephanus Buettgenbach

doi:10.1117/12.444142

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8 October 2001 New pneumatically actuated miniature gripper for microassembly

Sebastian Buetefisch, Stephanus Buettgenbach

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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444142
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

This paper presents a micro gripper driven by a new piston type pneumatic micro actuator. The basic structure of the micro gripper and the actuator are fabricated by silicon dry etching in a single etch step. The device consists of a pyrex-silicon-pyrex sandwich structure which was mounted by anodic bonding. Alternatively a SU8 depth lithography process was used to realise the pneumatic driven micro gripper. The assembly of various micro parts including a recently presented tactile silicon 3D-micro probe is described.

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Sebastian Buetefisch and Stephanus Buettgenbach "New pneumatically actuated miniature gripper for microassembly", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444142

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