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8 October 2001 Optically transparent gripper for microassembly
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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444143
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States
Abstract
Production of complex Micro-Opto Electro-Mechanical Systems (MOEMS) often requires assembly of a system from individual components built by mutually incompatible processes. This fabrication step also constitutes the largest portion of the total cost (about 80%), and is one of the major roadblocks to successfully implementing a complex microsystem. Our previous experience with such systems shows, that gripping and manipulation of microparts significantly differs from the assembly of macroscopic devices. The main difference stems from the increased role of the surface electrostatic forces and the reduced influence of body forces such as gravity. This paper describes one possible use of the surface forces in the development of a novel optically transparent electrostatic microgripper. The principle of operation, design and simulation of the new device are described. Several models describing the gripping force are also presented. The out-of-plane and in-plane holding (frictional) forces are measured as a function of the applied voltage for two common materials - silicon and nickel. The fabrication sequence and the materials used are discussed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eniko T. Enikov and Kalin V. Lazarov "Optically transparent gripper for microassembly", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444143
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