Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process

William B. Spillman Jr.; Tingying Zeng; Richard O. Claus

doi:10.1117/12.454599

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19 November 2001 Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process

William B. Spillman Jr., Tingying Zeng, Richard O. Claus

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Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454599
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

The electo-static self-assembly process (ESA) has proved to be extremely successful in creating multi-layer coatings with properties that can be tailored for particular applications. In this process, almost any surface with charged functional groups can be used as a substrate. Alternate dipping in solutions having ions of opposite charge builds up the layers through ionic bonding. One particular application of this process could be to form multi-functional bio-compatible coatings on MEMS devices intended for use in-vivo. In this paper, we describe two different models of the process based on cellular automata. The output of the models consists of three parameters as a function of layer: ionic coverage, film height and film roughness. The results of the models are compared to experimental data to determine which of them more accurately describes the ESA process.

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William B. Spillman Jr., Tingying Zeng, and Richard O. Claus "Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454599

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