Investigation of MoO3-WO3 thin film microstructure for gas sensing applications

Kosmas Galatsis; Muralihar K. Ghantasala; Yongxiang Li; Kourosh Kalantar-Zadeh; Adrian Trinchi; Wojtek Wlodarski; A. Taurino; Pietro Siciliano; Lara Cukrov

doi:10.1117/12.454610

19 November 2001 Investigation of MoO₃-WO₃ thin film microstructure for gas sensing applications

Kosmas Galatsis, Muralihar K. Ghantasala, Yongxiang Li, Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, A. Taurino, Pietro Siciliano, Lara Cukrov

Author Affiliations +

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454610
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

MoO₃-WO₃ thin films have been fabricated via the sol-gel method. FESEM, TEM, RBS and SIMS analysis techniques have been employed to analyse the films and material properties for use as gas sensors to detect CO and NO₂. FESEM shows the film made up of segregated molybdenum crystals. TEM highlights the nano-sized grains sructure and crystallinity. RBS analysis confirmed the films are stoichimetric and that the Mo component of the system decreases as the annealing temperature is increased. SIMS illustrates the interesting elemental depth profiles of the films. The films were exposed to CO and NO₂. MoO₃-WO₃ shows better NO₂ sensitivity and selectivity compared to its single metal oxide constituents.

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Kosmas Galatsis, Muralihar K. Ghantasala, Yongxiang Li, Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, A. Taurino, Pietro Siciliano, and Lara Cukrov "Investigation of MoO₃-WO₃ thin film microstructure for gas sensing applications", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454610

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