Nanoscale phosphorous atom arrays created using STM for the fabricaton of a silicon-based quantum computer

J. L. O'Brien; S. R. Schofield; M. Y. Simmons; Robert G. Clark; Andrew S. Dzurak; N. J. Curson; Bruce E. Kane; N. S. McAlpine; Marilyn E. Hawley; Geoffrey W. Brown

doi:10.1117/12.454617

19 November 2001 Nanoscale phosphorous atom arrays created using STM for the fabricaton of a silicon-based quantum computer

J. L. O'Brien, S. R. Schofield, M. Y. Simmons, Robert G. Clark, Andrew S. Dzurak, N. J. Curson, Bruce E. Kane, N. S. McAlpine, Marilyn E. Hawley, Geoffrey W. Brown

Author Affiliations +

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454617
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Quantum computers offer the promise of formidable computational power for certain tasks. Of the various possible physical implementations of such a device, silicon based architectures are attractive for their scalability and ease of integration with existing silicon technology. These designs use either the electron or nuclear spin state of single donor atoms to store quantum information. Here we describe a strategy to fabricate an array of single phosphorus atoms in silicon for the construction of such a silicon based quantum computer. We demonstrate the controlled placement of single phosphorus bearing molecules on a silicon surface. This has been achieved by patterning a hydrogen mono-layer resist with a scanning tunneling microscope (STM) tip and exposing the patterned surface to phosphine (PH₃) molecules. We also describe preliminary studies into a process to incorporate these surface phosphorus atoms into the silicon crystal at the array sites.

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J. L. O'Brien, S. R. Schofield, M. Y. Simmons, Robert G. Clark, Andrew S. Dzurak, N. J. Curson, Bruce E. Kane, N. S. McAlpine, Marilyn E. Hawley, and Geoffrey W. Brown "Nanoscale phosphorous atom arrays created using STM for the fabricaton of a silicon-based quantum computer", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454617

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