Characterization of a CMOS humidity sensor using different polyimides as sensing films

Yanyan Qiu; Carlos Azeredo-Leme; Luis Alcacer; Jose E. Franca

doi:10.1117/12.449161

21 November 2001 Characterization of a CMOS humidity sensor using different polyimides as sensing films

Yanyan Qiu, Carlos Azeredo-Leme, Luis Alcacer, Jose E. Franca

Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449161
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

This paper describes the characterization of a CMOS humidity sensor using three Dupont polyimides, PI2555, PI2610, and PI2723 as sensing films. The sensing principle of the sensor is the dielectric constant change of deposited sensing films due to absorption/adsorption of water. The humidity sensing film is deposited by a post-processing step after the standard CMOS fabrication. The on-chip calibration circuit is based on a switched-capacitor front-end, featuring high linearity, insensitivity to temperature, as well as low power consumption. The measured results show that the coating film thickness incluences the sensor response speed, but has no influence on the sensor transfer function, thanks to the on-chip calibration circuit. Sensor coated with PI2555 has better performance then other two regarding to sensitivity, response speed, and stability.

Citation Download Citation

Yanyan Qiu, Carlos Azeredo-Leme, Luis Alcacer, and Jose E. Franca "Characterization of a CMOS humidity sensor using different polyimides as sensing films", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449161

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available