Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications

Kourosh Kalantar-Zadeh; Adrian Trinchi; Wojtek Wlodarski; Anthony Holland; Kosmas Galatsis

doi:10.1117/12.449140

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21 November 2001 Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications

Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, Kosmas Galatsis

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Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449140
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Layered Surface Acoustic Wave (SAW) devices that allow the propagation of Love mode acoustic waves will be studied in this paper. In these devices, the substrate allows the propagation of Surface Skimming Bulks Waves (SSBWs). By depositing layers, that the speed of Shear Horizontal (SH) acoustic wave propagation is less than that of the substrate, the propagation mode transforms to Love mode. Love mode devices which will be studied in this paper, have SiO2 and ZnO acoustic guiding layers. As Love mode of propagation has no movement of particles component normal to the active sensor surface, they can be employed for the sensing applications in the liquid media.

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Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, and Kosmas Galatsis "Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449140

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