LIGA fabrication of high-aspect-ratio lobster-eye optics

Andrew G. Peele; Thomas H. K. Irving; Keith A. Nugent; Derrick C. Mancini; Nicolai A. Moldovan; Todd R. Christenson

doi:10.1117/12.448995

21 November 2001 LIGA fabrication of high-aspect-ratio lobster-eye optics

Andrew G. Peele, Thomas H. K. Irving, Keith A. Nugent, Derrick C. Mancini, Nicolai A. Moldovan, Todd R. Christenson

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448995
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Lobster-eye optics are an exciting advance in the field of x-ray astronomy, specifically as focusing optics for wide field of view telescopes. In its simplest form the optic is a square packed array of square-channels. Typical channel dimensions are width 10 - 30 mm, length 300 - 1000 mm, and wall thickness of ~2 - 5 mm. These dimensions raise the question of whether such devices can be made in the deep x-ray LIGA regime. Following recent success in fabricating a low aspect ratio Lobster-eye structure, we discuss some of the parameters for, and production issues involved in making, a useful high aspect ratio Lobster-eye prototype. We report on our initial attempts to produce high aspect ratio Lobster-eye optics using the LIGA process with a Graphite substrate.

Citation Download Citation

Andrew G. Peele, Thomas H. K. Irving, Keith A. Nugent, Derrick C. Mancini, Nicolai A. Moldovan, and Todd R. Christenson "LIGA fabrication of high-aspect-ratio lobster-eye optics", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448995

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