MEMS sensor packaging using LTCC substrate technology

Harri K. Kopola; Jaakko Lenkkeri; Kari Kautio; Altti Torkkeli; Outi Rusanen; Tuomo Jaakola

doi:10.1117/12.448960

21 November 2001 MEMS sensor packaging using LTCC substrate technology

Harri K. Kopola, Jaakko Lenkkeri, Kari Kautio, Altti Torkkeli, Outi Rusanen, Tuomo Jaakola

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448960
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Low Temperature Cofired Ceramic (LTCC) material can be used as a reliable multilayer substrate material for silicon based MEMS component packaging due to many benefits like hermeticity, good match of thermal expansion coefficient (TCE) to silicon to minimise packaging-induced thermomechanical stresses, and the possibility to make cavities into the structure. The applicability of LTCC technologies for MEMS packaging is described in this paper. A review of the technologies used in making LTCC modules, such as substrate manufacturing, interconnecting, sealing and protection, and the benefits of LTCC for MEMS packaging is presented. Also examples on the use of LTCC technology for MEMS sensor packaging are discussed.

Citation Download Citation

Harri K. Kopola, Jaakko Lenkkeri, Kari Kautio, Altti Torkkeli, Outi Rusanen, and Tuomo Jaakola "MEMS sensor packaging using LTCC substrate technology", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448960

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available