MEMS-based micromirror device for optical add/drop module

J.C. Chiou; Yu-Chen Lin; S. D. Wu; Shiuan-Huei Lin

doi:10.1117/12.448839

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19 November 2001 MEMS-based micromirror device for optical add/drop module

J.C. Chiou, Yu-Chen Lin, S. D. Wu, Shiuan-Huei Lin

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Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448839
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

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J.C. Chiou, Yu-Chen Lin, S. D. Wu, and Shiuan-Huei Lin "MEMS-based micromirror device for optical add/drop module", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448839

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