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19 November 2001 MEMS-based micromirror device for optical add/drop module
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Abstract
In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J.C. Chiou, Yu-Chen Lin, S. D. Wu, and Shiuan-Huei Lin "MEMS-based micromirror device for optical add/drop module", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448839
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